Semiconductor and Electronics
Chamber seals and enclosure gaskets for semiconductor and electronics
In a process chamber the grade number is the specification, so we quote the grade your tool maker qualified rather than an equivalent. Conquest Seal supplies those seals in inch and metric sizes, and cuts the enclosure and lid gaskets for the electronics side on our own waterjet. A substitute across brands is a requalification, not a cross-reference, so we offer an alternate only if you ask for one. Send the grade number and the size and a Conquest representative replies with the quote.
Photo by TECNIC Bioprocess Solutions.
- Standards
- AMS7257 FFKM sealing rings; AS568 and ISO 3601-1 sizes; SAE AS4716 and ISO 3601-2 glands
- Typical seals
- FFKM chamber O-rings, slit-valve and lid seals, waterjet-cut enclosure gaskets, silicone and fluorosilicone fixture gaskets
- Materials
- Perfluoroelastomer for chamber service, by the grade your tool maker qualified; silicone and fluorosilicone for enclosures and fixtures; PTFE sheet
- Quality
- Parts in the maker packaging, unopened, labeled by grade and lot, with a certificate of conformance naming the part number, the specification, the manufacturer, the lot and the quantity.
Two very different jobs sit under one heading here. Inside the tool, a seal faces plasma, acids and heat, and the wrong compound contaminates wafers. Outside it, an enclosure needs a gasket cut to shape.
Chamber seals
The perfluoroelastomer grades carry their own numbers because their makers formulate them for a specific process, which is why the grade travels on the drawing and the family does not. We quote what the drawing names. The FFKM material page and the brand cross-reference cover who makes what.
Enclosure and fixture gaskets
Lid and enclosure gaskets are cut to your drawing from silicone, fluorosilicone or neoprene sheet, solid or sponge, adhesive-backed where the assembly needs it. There is no tooling, so a prototype run is as easy as a production one. See gaskets.
What ships with the part
Parts arrive in the maker packaging, unopened, labeled by grade and lot, with a certificate of conformance naming the part number, the specification, the manufacturer, the lot and the quantity.
What we supply
Product lines for semiconductor and electronics
O-rings
The part most people mean by a seal. We stock every AS568 size.
Gaskets
Seals the joint between two flat faces, cut to your drawing on our own waterjet in Orange, California, with no tooling.
Machined plastic parts
Seats, back-up rings, bushings and wear rings in PTFE, PEEK, UHMW and nylon, machined to your print by the shops we source from, where rubber would extrude or wear.
Rubber compounds
For prints that name a compound rather than a part. Standard grades and the AMS and MIL specification grades a drawing can call out.
Materials
What comes up on semiconductor and electronics prints
- FFKM O-Rings
- Plasma, wet-bench acids and heat, where nothing else lasts.
- Kalrez® O-Rings
- Named on many tool drawings. Quote the grade, not the family.
- Chemraz® O-Rings
- The other brand you will see specified by grade.
- Silicone O-Rings
- Enclosure and fixture gaskets rather than chamber service.
The compound named on your print governs. Send it with the part number and we quote that compound.
Kalrez is a trademark of Qnity Electronics; Chemraz is a trademark of Greene Tweed. No affiliation or endorsement is implied.
Related guides
What to send us
The grade number and the size, the quantity, and the tool or chamber the seal serves. Say whether the print allows an equal. For gaskets, send the DXF and the sheet material.
Request a quoteLast updated