Semiconductor FFKM Seals

Conquest supplies FFKM O-rings for semiconductor wet, plasma and deposition process chambers in the grades the equipment makers qualify: the ultra-pure and plasma-resistant lines from Kalrez®, Chemraz® and other perfluoroelastomer makers, in AS568 and metric sizes, as a distributor, not affiliated with the brand owners. In semiconductor service the grade number is the specification: substitution across brands is a requalification, not a cross-reference, and this page is written on that basis.

Why FFKM in the chamber

Process chambers combine aggressive chemistry (fluorine and chlorine plasmas, ozone, wet-bench acids and solvents), heat, and a purity requirement no filled elastomer meets: a seal that sheds particles or leaches extractables contaminates wafers. Perfluoroelastomer is chemically inert in the way PTFE is while sealing like rubber, and the semiconductor grades are formulated with special fillers or none, which is why they carry their own grade numbers. The Parker® O-Ring Handbook (ORD 5700) rates the FFKM class from -26 C (-15 F) to 320 C (608 F) for standard compounds; the grade sheet governs, and some grades on file go higher.

Grades by process (manufacturer descriptions)

What we supply, and how

What to send

The grade number and the size (AS568 dash or the inside diameter and cross-section in millimeters), the quantity, the tool or chamber the seal serves, and whether the print allows an equal. If the grade is not known, the process family (etch, deposition, wet bench, transfer) and the chemistry narrow it to the makers' recommended grades, and the tool owner makes the final call. Semiconductor grades are finished parts from the brand owner, so a non-standard size is a molded special; a standard AS568 size in a catalog grade avoids a molded special.

Kalrez is a trademark of Qnity Electronics; Chemraz is a trademark of Greene Tweed; Markez is a trademark of Marco Sealing Solutions; Parofluor is a trademark of Parker Hannifin; Perlast is a trademark of Precision Polymer Engineering (IDEX). Parker is a trademark of Parker Hannifin Corporation. No affiliation or endorsement is implied.

Reviewed by Grant Midstokke, Conquest Seal Corporation. Last updated September 2026. Material ranges and process figures are the published references named beside them.