Semiconductor FFKM Seals

Conquest supplies FFKM O-rings for semiconductor wet, plasma and deposition process chambers in the grades the equipment makers qualify: the ultra-pure and plasma-resistant lines from Kalrez®, Chemraz® and other perfluoroelastomer makers, in AS568 and metric sizes, as a distributor, not affiliated with the brand owners. In semiconductor service the grade number is the specification: substitution across brands is a requalification, not a cross-reference, and this page is written on that basis.

Why FFKM in the chamber

Process chambers combine aggressive chemistry (fluorine and chlorine plasmas, ozone, wet-bench acids and solvents), heat, and a purity requirement no filled elastomer meets: a seal that sheds particles or leaches extractables contaminates wafers. Perfluoroelastomer is chemically inert in the way PTFE is while sealing like rubber, and the semiconductor grades are formulated with special fillers or none, which is why they carry their own grade numbers. The Parker® O-Ring Handbook (ORD 5700) rates the FFKM class from -26 C (-15 F) to 320 C (608 F) for standard compounds; the grade sheet governs, and some grades go higher.

Grades by process (manufacturer descriptions)

The rows are our grouping, built from each maker's own process recommendations; the grade sheet and the tool owner's qualification decide the part.

Kalrez rows are from Qnity's semiconductor selector guides for plasma processes (KZE-A40111) and thermal processes (KZE-A40112), June 2022, and the Kalrez 9600 data sheet (KZE-A40061), read 2026-09-25, with the wet-process row from the February 2012 selector guide (KZE-H88232), read 2026-09-14. Chemraz rows are from the Greene Tweed G57, G20 and E38 data sheets (2023 and 2024), read 2026-09-25. The FFKM range is the Parker O-Ring Handbook ORD 5700 service temperature table, page 7-2, read 2026-09-25.

What we supply, and how

What to send

The grade number and the size (AS568 dash or the inside diameter and cross-section in millimeters), the quantity, the tool or chamber the seal serves, and whether the print allows an equal. The FFKM brands and grades cross-reference puts makers' sheets side by side. If the grade is not known, the process family (etch, deposition, wet bench, transfer) and the chemistry narrow it to the makers' recommended grades, and the tool owner makes the final call. Semiconductor grades are finished parts from the brand owner, so a non-standard size is a molded special; a standard AS568 size in a catalog grade avoids a molded special.

Kalrez is a trademark of Qnity Electronics; Chemraz is a trademark of Greene Tweed. Parker is a trademark of Parker Hannifin Corporation. No affiliation or endorsement is implied.